Chiao, J. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaChiao, Jung-Chih. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. SPIE Digital Library.
MLA (9th ed.) ZitazioaChiao, Jung-Chih. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. SPIE Digital Library.
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