Maher, M. A. Micromachining and Microfabrication Process Technology X. SPIE Digital Library.
Cita Chicago (17th ed.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology X. SPIE Digital Library.
Cita MLA (9th ed.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology X. SPIE Digital Library.
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