Tanner, D. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV. SPIE Digital Library.
Cita Chicago (17th ed.)Tanner, Danelle. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV. SPIE Digital Library.
Cita MLA (9th ed.)Tanner, Danelle. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.