Henning, A. MEMS/MOEMS Components and Their Applications II. SPIE Digital Library.
Cita Chicago (17th ed.)Henning, Albert. MEMS/MOEMS Components and Their Applications II. SPIE Digital Library.
Cita MLA (9th ed.)Henning, Albert. MEMS/MOEMS Components and Their Applications II. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.