Henning, A. MEMS/MOEMS Components and Their Applications II. SPIE Digital Library.
Chicago Style (17. basım) AtıfHenning, Albert. MEMS/MOEMS Components and Their Applications II. SPIE Digital Library.
MLA (9th ed.) AtıfHenning, Albert. MEMS/MOEMS Components and Their Applications II. SPIE Digital Library.
Uyarı: Bu alıntı herzaman %100 doğru olmayabilir..