Cita APA

Silver, R. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

Citación estilo Chicago

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

Cita MLA

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.