APA citiranje

Silver, R. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

MLA citiranje

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

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