APA (7. basım) Alıntı

Silver, R. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

MLA (9th ed.) Atıf

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XIX. SPIE Digital Library.

Uyarı: Bu alıntı herzaman %100 doğru olmayabilir..