Behringer, U. 21st European Mask and Lithography Conference. SPIE Digital Library.
Cita Chicago (17th ed.)Behringer, Uwe. 21st European Mask and Lithography Conference. SPIE Digital Library.
Cita MLA (9th ed.)Behringer, Uwe. 21st European Mask and Lithography Conference. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.