Komuro, M. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.
Chicago Style (17. basım) AtıfKomuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.
MLA (9th ed.) AtıfKomuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.
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