APA (7th ed.) Citation

Archie, C. Metrology, Inspection, and Process Control for Microlithography XX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XX. SPIE Digital Library.

MLA (9th ed.) Citation

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.