Cita APA

Archie, C. Metrology, Inspection, and Process Control for Microlithography XX. SPIE Digital Library.

Citación estilo Chicago

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XX. SPIE Digital Library.

Cita MLA

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.