APA (7th ed.) Citation

Lin, Q. Advances in Resist Technology and Processing XXIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lin, Qinghuang. Advances in Resist Technology and Processing XXIII. SPIE Digital Library.

MLA (9th ed.) Citation

Lin, Qinghuang. Advances in Resist Technology and Processing XXIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.