Mack, C. A. Field Guide to Optical Lithography. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaMack, Chris A. Field Guide to Optical Lithography. SPIE Digital Library.
MLA (9th ed.) ZitazioaMack, Chris A. Field Guide to Optical Lithography. SPIE Digital Library.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.