APA (7th ed.) Citation

Urey, H. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Urey, Hakan. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.

MLA (9th ed.) Citation

Urey, Hakan. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.