Urey, H. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.
Lua i Stíl Chicago (17ú heag.)Urey, Hakan. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.
Lua MLA (9ú heag.)Urey, Hakan. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.
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