APA (7th ed.) Zitazioa

Urey, H. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Urey, Hakan. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Urey, Hakan. MEMS, MOEMS, and Micromachining II. SPIE Digital Library.

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