Houga, M. Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Digital Library.
Chicago-viite (17. p.)Houga, Morihisa. Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Digital Library.
MLA-viite (9. p.)Houga, Morihisa. Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Digital Library.
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