Chiao, J. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III. SPIE Digital Library.
Cita Chicago (17th ed.)Chiao, Jung-Chih. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III. SPIE Digital Library.
Cita MLA (9th ed.)Chiao, Jung-Chih. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.