Maher, M. A. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
Cita Chicago (17th ed.)Maher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
Cita MLA (9th ed.)Maher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
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