Maher, M. A. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
Citação norma ChicagoMaher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
Citação norma MLAMaher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.