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Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII

Dades bibliogràfiques
Altres autors:	Maher, Mary Ann
Format:	Electrònic eBook
Idioma:	anglès
Publicat:	SPIE Digital Library, 2/8/07
Matèries:	Conference papers and proceedings.
Accés en línia:	Full text available on Research4Life (SPIE Digital Library)

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