APA (7th ed.) Zitazioa

Archie, C. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.

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