APA citiranje

Archie, C. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.

MLA citiranje

Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.

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