Archie, C. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.
Chicago Style (17. basım) AtıfArchie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.
MLA (9th ed.) AtıfArchie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.
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