Cita APA (7a ed.)

Behringer, U. 23rd European Mask and Lithography Conference. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Behringer, Uwe. 23rd European Mask and Lithography Conference. SPIE Digital Library.

Cita MLA (9a ed.)

Behringer, Uwe. 23rd European Mask and Lithography Conference. SPIE Digital Library.

Precaución: Estas citas no son 100% exactas.