Watanabe, H. Photomask and Next-Generation Lithography Mask Technology XIV. SPIE Digital Library.
Chicago-čujuhus (17. p.)Watanabe, Hidehiro. Photomask and Next-Generation Lithography Mask Technology XIV. SPIE Digital Library.
MLA-čujuhus (9. p.)Watanabe, Hidehiro. Photomask and Next-Generation Lithography Mask Technology XIV. SPIE Digital Library.
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