Behringer, U. 24th European Mask and Lithography Conference. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingBehringer, Uwe. 24th European Mask and Lithography Conference. SPIE Digital Library.
MLA (9e ed.) BronvermeldingBehringer, Uwe. 24th European Mask and Lithography Conference. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.