Bakshi, V. EUV Lithography. SPIE Digital Library.
Cita Chicago (17th ed.)Bakshi, Vivek. EUV Lithography. SPIE Digital Library.
Cita MLA (9th ed.)Bakshi, Vivek. EUV Lithography. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.