EUV Lithography

Extreme Ultraviolet (EUV) Lithography VI

Extreme Ultraviolet (EUV) Lithography X

Extreme Ultraviolet (EUV) Lithography II

Extreme Ultraviolet (EUV) Lithography III

Extreme Ultraviolet (EUV) Lithography VIII

Extreme Ultraviolet (EUV) Lithography VII

Extreme Ultraviolet (EUV) Lithography V

Extreme Ultraviolet (EUV) Lithography IV

Extreme Ultraviolet (EUV) Lithography XI

Extreme Ultraviolet (EUV) Lithography XII

Extreme Ultraviolet (EUV) Lithography IX

Optical and EUV Lithography: A Modeling Perspective
‌: Erdmann, Andreas

X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography

Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II

Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V

Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI

Chemistry and Lithography
‌: Okoroanyanwu, Uzodinma

Submicron Lithography I

Lithography for Semiconductor Manufacturing

Lithography Asia 2008

Molecular Theory of Lithography
‌: Okoroanyanwu, Uzodinma

Lithography Process Control
‌: Levinson, Harry J.

Extreme Ultraviolet Lithography
‌: Levinson, Harry J.

Lithography Asia 2009

Chemistry and Lithography, Second Edition, Vol. 2: Chemistry in Lithography
‌: Okoroanyanwu, Uzodinma

Chemistry and Lithography, Second Edition, Vol. 1: The Chemical History of Lithography
‌: Okoroanyanwu, Uzodinma

Optical and EUV Nanolithography XXXVI

Principles of Lithography, Fourth Edition
‌: Levinson, Harry J.

Lithography for Semiconductor Manufacturing II

Optical Lithography: Here Is Why
‌: Lin, Burn J.

Dry Processing for Submicrometer Lithography

Technology of Proximal Probe Lithography

Field Guide to Optical Lithography
‌: Mack, Chris A.

Optical and EUV Nanolithography XXXV