Tan, H. H. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
Chicago-viite (17. p.)Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
MLA-viite (9. p.)Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
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