Tan, H. H. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
Чикаго-гийн эшлэл (17 дахь хэвлэлт)Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
MLA -ийн эшлэл (9 дэх хэвлэлт)Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
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