Tan, H. H. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
Цитирование в стиле Чикаго (17-е изд.)Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
Цитирование MLA (9-е изд.)Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
Предупреждение: эти цитированмия не могут быть всегда правильны на 100%.