Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV

Bibliografiske detaljer
Andre forfattere: Tan, Hark Hoe
Format: Electronisk eBog
Sprog:engelsk
Udgivet: SPIE Digital Library, 12/10/07
Fag:
Online adgang:Full text available on Research4Life (SPIE Digital Library)

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