APA (7th ed.) Citation

Maher, M. A. Micromachining and Microfabrication Process Technology XIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Maher, Mary Ann. Micromachining and Microfabrication Process Technology XIII. SPIE Digital Library.

MLA (9th ed.) Citation

Maher, Mary Ann. Micromachining and Microfabrication Process Technology XIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.