Hartzell, A. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Citação norma ChicagoHartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Citação norma MLAHartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.