Hartzell, A. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Chicago Style (17. basım) AtıfHartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
MLA (9th ed.) AtıfHartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
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