MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
| Andere auteurs: | |
|---|---|
| Formaat: | Elektronisch E-boek |
| Taal: | Engels |
| Gepubliceerd in: |
SPIE Digital Library,
2/22/08
|
| Onderwerpen: | |
| Online toegang: | Full text available on Research4Life (SPIE Digital Library) |