MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
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| Formato: | Recurso Electrónico livro electrónico |
| Idioma: | inglês |
| Publicado em: |
SPIE Digital Library,
2/22/08
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| Acesso em linha: | Full text available on Research4Life (SPIE Digital Library) |