Cita APA (7th ed.)

Schellenberg, F. Emerging Lithographic Technologies XII. SPIE Digital Library.

Cita Chicago (17th ed.)

Schellenberg, Frank. Emerging Lithographic Technologies XII. SPIE Digital Library.

Cita MLA (9th ed.)

Schellenberg, Frank. Emerging Lithographic Technologies XII. SPIE Digital Library.

Atenció: Aquestes cites poden no estar 100% correctes.