APA (7th ed.) Citation

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

MLA (9th ed.) Citation

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

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