Style de citation APA (7e éd.)

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Style de citation Chicago (17e éd.)

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Style de citation MLA (9e éd.)

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Attention : ces citations peuvent ne pas être correctes à 100%.