Cita APA

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Citación estilo Chicago

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Cita MLA

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.