Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.
Čikaški stil citiranja (17. izdanje)Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.
MLA način citiranja (9. izdanje)Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.
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