APA (7e ed.) Bronvermelding

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Chicago (17e ed.) Bronvermelding

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

MLA (9e ed.) Bronvermelding

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Let op: Deze citaties zijn niet altijd 100% accuraat.