APA citiranje

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

MLA citiranje

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

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