APA引文

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

MLA引文

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXII. SPIE Digital Library.

警告:這些引文格式不一定是100%准確.