APA (7th ed.) Citation

Levinson, H. Optical Microlithography XXI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Levinson, Harry. Optical Microlithography XXI. SPIE Digital Library.

MLA (9th ed.) Citation

Levinson, Harry. Optical Microlithography XXI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.