Horiuchi, T. Photomask and Next-Generation Lithography Mask Technology XV. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingHoriuchi, Toshiyuki. Photomask and Next-Generation Lithography Mask Technology XV. SPIE Digital Library.
MLA (9e ed.) BronvermeldingHoriuchi, Toshiyuki. Photomask and Next-Generation Lithography Mask Technology XV. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.