APA citiranje

Horiuchi, T. Photomask and Next-Generation Lithography Mask Technology XV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Horiuchi, Toshiyuki. Photomask and Next-Generation Lithography Mask Technology XV. SPIE Digital Library.

MLA citiranje

Horiuchi, Toshiyuki. Photomask and Next-Generation Lithography Mask Technology XV. SPIE Digital Library.

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