Maher, M. A. Micromachining and Microfabrication Process Technology XIV. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIV. SPIE Digital Library.
MLA (9th ed.) ZitazioaMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIV. SPIE Digital Library.
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